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Authors:A. Deleniv: Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden
S. Abadei: Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden
S. Gevorgian: Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden \ Microwave and High Speed Research Center, Ericsson Microwave Systems, Sweden
Publication title:Microwave Characterization of Thin Ferroelectric Films
Conference:GigaHertz 2003. Proceedings from the Seventh Symposium
Publication type: Poster
Issue:008
Article No.:070
Abstract:A simple technique for characterization of dielectrics at high microwave frequencies is presented and demonstrated. The technique makes use of the measured impedance of a test structure. The latter is a simple capacitor; formed on the top of a substrate with an arbitrary number of dielectric/conductor layers and contains a material under test (MUT) layer with unknown loss tangent and dielectric constant. Assuming that all other layers are specified; a simple method is given to calculate RF impedance of such a structure enabling extraction of MUT properties.
Language:English
Year:2003
No. of pages:4
Series:Linköping Electronic Conference Proceedings
ISSN (print):1650-3686
ISSN (online):1650-3740
File:http://www.ep.liu.se/ecp/008/posters/044/ecp00844p.pdf
Available:2003-11-06
Publisher:Linköping University Electronic Press; Linköpings universitet

REFERENCE TO THIS PAGE
A. Deleniv, S. Abadei, S. Gevorgian (2003). Microwave Characterization of Thin Ferroelectric Films, GigaHertz 2003. Proceedings from the Seventh Symposium http://www.ep.liu.se/ecp_article/index.en.aspx?issue=008;article=070 (accessed 11/24/2014)