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Authors:A. Deleniv: Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden
S. Abadei: Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden
S. Gevorgian: Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden \ Microwave and High Speed Research Center, Ericsson Microwave Systems, Sweden
Publication title:Microwave Characterization of Thin Ferroelectric Films
Conference:GigaHertz 2003. Proceedings from the Seventh Symposium
Publication type: Poster
Issue:008
Article No.:070
Abstract:A simple technique for characterization of dielectrics at high microwave frequencies is presented and demonstrated. The technique makes use of the measured impedance of a test structure. The latter is a simple capacitor, formed on the top of a substrate with an arbitrary number of dielectric/conductor layers and contains a material under test (MUT) layer with unknown loss tangent and dielectric constant. Assuming that all other layers are specified, a simple method is given to calculate RF impedance of such a structure enabling extraction of MUT properties.
Language:English
Year:2003
No. of pages:4
Series:Linköping Electronic Conference Proceedings
ISSN (print):1650-3686
ISSN (online):1650-3740
File:http://www.ep.liu.se/ecp/008/posters/044/ecp00844p.pdf
Available:2003-11-06
Publisher:Linköping University Electronic Press, Linköpings universitet

REFERENCE TO THIS PAGE
A. Deleniv, S. Abadei, S. Gevorgian (2003). Microwave Characterization of Thin Ferroelectric Films, GigaHertz 2003. Proceedings from the Seventh Symposium http://www.ep.liu.se/ecp_article/index.en.aspx?issue=008;article=070 (accessed 9/18/2014)