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Authors:Anders Mellberg: Chalmers University of Technology, Sweden
Emmanuil Choumas: Unaxis Balzers Aktiengesellschaft, Liechtenstein
Niklas Rorsman: Chalmers University of Technology, Sweden
Samuel P. Nicols: Chalmers University of Technology, Sweden
Jan Grahn: Chalmers University of Technology, Sweden
Herbert Zirath: Chalmers University of Technology, Sweden
Publication title:Fabrication and modeling of passive components for InP-based MMICs
Conference:GigaHertz 2003. Proceedings from the Seventh Symposium
Publication type: Poster
Issue:008
Article No.:061
Abstract:Passive components for use in planar Monolithic Microwave Integrated Circuits (MMICs) based on High Electron Mobility Transistors (HEMTs) on indium phosphide substrates are presented. Design, fabrication, and modeling issues of capacitors, resistors, inductors, transmission lines, via holes, and air bridges have been addressed. Sputtered thin films have been utilized to make metal-insulator-metal (MIM) capacitors and thin film resistors (TFRs). Silicon dioxide and silicon nitride MIM capacitors exhibited capacitances from 100 to 300 pF/mm2 and tantalum nitride TFRs sheet resistivities of 80-85 ohms per square. Our microstrip transmission line fabrication technology has been utilized to make multi-turn, air bridged spiral inductors spanning from 0.5 nH to 4 nH. Air bridges and ground via holes have been used for connection and testing purposes. Scattering (S-) parameters, from 5 to 48 GHz, of all fabricated components have been measured and scalable models for CAD purposes investigated.
Language:English
Year:2003
No. of pages:4
Series:Linköping Electronic Conference Proceedings
ISSN (print):1650-3686
ISSN (online):1650-3740
File:http://www.ep.liu.se/ecp/008/posters/035/ecp00835p.pdf
Available:2003-11-06
Publisher:Linköping University Electronic Press, Linköpings universitet

REFERENCE TO THIS PAGE
Anders Mellberg, Emmanuil Choumas, Niklas Rorsman, Samuel P. Nicols, Jan Grahn, Herbert Zirath (2003). Fabrication and modeling of passive components for InP-based MMICs, GigaHertz 2003. Proceedings from the Seventh Symposium http://www.ep.liu.se/ecp_article/index.en.aspx?issue=008;article=061 (accessed 8/27/2014)