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Authors:Anders Mellberg: Chalmers University of Technology, Sweden
Emmanuil Choumas: Unaxis Balzers Aktiengesellschaft, Liechtenstein
Niklas Rorsman: Chalmers University of Technology, Sweden
Samuel P. Nicols: Chalmers University of Technology, Sweden
Jan Grahn: Chalmers University of Technology, Sweden
Herbert Zirath: Chalmers University of Technology, Sweden
Publication title:Fabrication and modeling of passive components for InP-based MMICs
Conference:GigaHertz 2003. Proceedings from the Seventh Symposium
Publication type: Poster
Issue:008
Article No.:061
Abstract:Passive components for use in planar Monolithic Microwave Integrated Circuits (MMICs) based on High Electron Mobility Transistors (HEMTs) on indium phosphide substrates are presented. Design; fabrication; and modeling issues of capacitors; resistors; inductors; transmission lines; via holes; and air bridges have been addressed. Sputtered thin films have been utilized to make metal-insulator-metal (MIM) capacitors and thin film resistors (TFRs). Silicon dioxide and silicon nitride MIM capacitors exhibited capacitances from 100 to 300 pF/mm2 and tantalum nitride TFRs sheet resistivities of 80-85 ohms per square. Our microstrip transmission line fabrication technology has been utilized to make multi-turn; air bridged spiral inductors spanning from 0.5 nH to 4 nH. Air bridges and ground via holes have been used for connection and testing purposes. Scattering (S-) parameters; from 5 to 48 GHz; of all fabricated components have been measured and scalable models for CAD purposes investigated.
Language:English
Year:2003
No. of pages:4
Series:Linköping Electronic Conference Proceedings
ISSN (print):1650-3686
ISSN (online):1650-3740
File:http://www.ep.liu.se/ecp/008/posters/035/ecp00835p.pdf
Available:2003-11-06
Publisher:Linköping University Electronic Press; Linköpings universitet

REFERENCE TO THIS PAGE
Anders Mellberg, Emmanuil Choumas, Niklas Rorsman, Samuel P. Nicols, Jan Grahn, Herbert Zirath (2003). Fabrication and modeling of passive components for InP-based MMICs, GigaHertz 2003. Proceedings from the Seventh Symposium http://www.ep.liu.se/ecp_article/index.en.aspx?issue=008;article=061 (accessed 10/25/2014)