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Authors:Vincent Desmaris: Microtechnology and Nanoscience, Microwave Electronics Laboratory, Chalmers Univeristy of Technology, Sweden
Joakim Eriksson: Microtechnology and Nanoscience, Microwave Electronics Laboratory, Chalmers Univeristy of Technology, Sweden
Niklas Rorsman: Microtechnology and Nanoscience, Microwave Electronics Laboratory, Chalmers Univeristy of Technology, Sweden
Herbert Zirath: Microtechnology and Nanoscience, Microwave Electronics Laboratory, Chalmers Univeristy of Technology, Sweden
Publication title:Fabrication and characterization of submicron AlGaN/GaN HEMTs
Conference:GigaHertz 2003. Proceedings from the Seventh Symposium
Publication type: Poster
Issue:008
Article No.:034
Abstract:Using our in-house 0.3 µm mushroom gate process, AlGaN/GaN high electron mobility transistors (HEMTs) with total gate periphery up to 0.6 mm were fabricated and characterized. The transistors were processed on an AlGaN/GaN heterostructure grown by MBE on sapphire. Output current densities up to 1 A/mm and extrinsic DC-transconductances (gm) of 240 mS/mm were measured. Extrinsic cut-off frequencies (ft) of 35 GHz, maximum frequencies of oscillation (fmax) of 75 GHz, were calculated from S-parameters measurements. On wafer Load-Pull measurements were performed without any active cooling on HEMTs of different sizes. Continuous wave (CW) output power densities up to 3.2 W/mm at 6 dB compression and 1.9 W/mm at 3 dB compression at 6 GHz were achieved.
Language:English
Year:2003
No. of pages:4
Series:Linköping Electronic Conference Proceedings
ISSN (print):1650-3686
ISSN (online):1650-3740
File:http://www.ep.liu.se/ecp/008/posters/008/ecp00808p.pdf
Available:2003-11-06
Publisher:Linköping University Electronic Press, Linköpings universitet

REFERENCE TO THIS PAGE
Vincent Desmaris, Joakim Eriksson, Niklas Rorsman, Herbert Zirath (2003). Fabrication and characterization of submicron AlGaN/GaN HEMTs, GigaHertz 2003. Proceedings from the Seventh Symposium http://www.ep.liu.se/ecp_article/index.en.aspx?issue=008;article=034 (accessed 7/22/2014)