Design of a tuneable filter-phase shifter is presented. Thin ferroelectric film varactors are used to provide voltage tuneable phase shift in a silicon Coplanar Waveguide (CPW). Varactors with zero bias capacitance 0.17pf; loss tangent tand=0.04 and 20% tuneability provide continuous voltage tuneable phase shift up to 90Â°Â±5Â° at 19 GHz with 10% bandwidth. The figure of merit is about 30Â°/dB. The sizes of the phase shifter silicon chip are less than 2x5.5mm. The phase shifter is designed for possible integration in silicon MMIC`s.