Article | GigaHertz 2003. Proceedings from the Seventh Symposium | Microwave Characterization of Thin Ferroelectric Films

Title:
Microwave Characterization of Thin Ferroelectric Films
Author:
A. Deleniv: Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden S. Abadei: Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden S. Gevorgian: Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden \ Microwave and High Speed Research Center, Ericsson Microwave Systems, Sweden
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Year:
2003
Conference:
GigaHertz 2003. Proceedings from the Seventh Symposium
Issue:
008
Article no.:
070
No. of pages:
4
Publication type:
Poster
Published:
2003-11-06
Series:
Linköping Electronic Conference Proceedings
ISSN (print):
1650-3686
ISSN (online):
1650-3740
Publisher:
Linköping University Electronic Press; Linköpings universitet


A simple technique for characterization of dielectrics at high microwave frequencies is presented and demonstrated. The technique makes use of the measured impedance of a test structure. The latter is a simple capacitor; formed on the top of a substrate with an arbitrary number of dielectric/conductor layers and contains a material under test (MUT) layer with unknown loss tangent and dielectric constant. Assuming that all other layers are specified; a simple method is given to calculate RF impedance of such a structure enabling extraction of MUT properties.

GigaHertz 2003. Proceedings from the Seventh Symposium

Author:
A. Deleniv, S. Abadei, S. Gevorgian
Title:
Microwave Characterization of Thin Ferroelectric Films
References:

[1] Z. Ma; Andrew J. Becker; P.Polakos; H. Huggins; J. Pastalan; Hui Wu; K.Watts; Y.H.Wong; and P. Mankiewich; “RF Measurement” Technique for Characterizing Thin Films”; IEEE Trans. Electron. Devices.


[2] Roger F. Harrington; “Time-Harmonic Electromagnetic Fields”; McGraw-Hill; Inc.; 1961.


[3] Kiyomichi Araki and Tatsuo Itoh; “Hankel Transform Domain Analysis of Open Circular Microstrip Radiating Structures”; IEEE Trans. Antenna and Prop.; Vol.AP-29;pp.84-89.


[4] S. Gevorgian; “Surface Impedance of Silicon Substrates and Films”; Int. J. RF and Microwave CAE; 1998; pp.433-439.

GigaHertz 2003. Proceedings from the Seventh Symposium

Author:
A. Deleniv, S. Abadei, S. Gevorgian
Title:
Microwave Characterization of Thin Ferroelectric Films
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