Article | GigaHertz 2003. Proceedings from the Seventh Symposium | Fabrication and modeling of passive components for InP-based MMICs

Title:
Fabrication and modeling of passive components for InP-based MMICs
Author:
Anders Mellberg: Chalmers University of Technology, Sweden Emmanuil Choumas: Unaxis Balzers Aktiengesellschaft, Liechtenstein Niklas Rorsman: Chalmers University of Technology, Sweden Samuel P. Nicols: Chalmers University of Technology, Sweden Jan Grahn: Chalmers University of Technology, Sweden Herbert Zirath: Chalmers University of Technology, Sweden
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Full text (pdf)
Year:
2003
Conference:
GigaHertz 2003. Proceedings from the Seventh Symposium
Issue:
008
Article no.:
061
No. of pages:
4
Publication type:
Poster
Published:
2003-11-06
Series:
Linköping Electronic Conference Proceedings
ISSN (print):
1650-3686
ISSN (online):
1650-3740
Publisher:
Linköping University Electronic Press; Linköpings universitet


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Passive components for use in planar Monolithic Microwave Integrated Circuits (MMICs) based on High Electron Mobility Transistors (HEMTs) on indium phosphide substrates are presented. Design; fabrication; and modeling issues of capacitors; resistors; inductors; transmission lines; via holes; and air bridges have been addressed. Sputtered thin films have been utilized to make metal-insulator-metal (MIM) capacitors and thin film resistors (TFRs). Silicon dioxide and silicon nitride MIM capacitors exhibited capacitances from 100 to 300 pF/mm2 and tantalum nitride TFRs sheet resistivities of 80-85 ohms per square. Our microstrip transmission line fabrication technology has been utilized to make multi-turn; air bridged spiral inductors spanning from 0.5 nH to 4 nH. Air bridges and ground via holes have been used for connection and testing purposes. Scattering (S-) parameters; from 5 to 48 GHz; of all fabricated components have been measured and scalable models for CAD purposes investigated.

GigaHertz 2003. Proceedings from the Seventh Symposium

Author:
Anders Mellberg, Emmanuil Choumas, Niklas Rorsman, Samuel P. Nicols, Jan Grahn, Herbert Zirath
Title:
Fabrication and modeling of passive components for InP-based MMICs
References:

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GigaHertz 2003. Proceedings from the Seventh Symposium

Author:
Anders Mellberg, Emmanuil Choumas, Niklas Rorsman, Samuel P. Nicols, Jan Grahn, Herbert Zirath
Title:
Fabrication and modeling of passive components for InP-based MMICs
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