Article | GigaHertz 2003. Proceedings from the Seventh Symposium | Fabrication and characterization of submicron AlGaN/GaN HEMTs

Title:
Fabrication and characterization of submicron AlGaN/GaN HEMTs
Author:
Vincent Desmaris: Microtechnology and Nanoscience, Microwave Electronics Laboratory, Chalmers Univeristy of Technology, Sweden Joakim Eriksson: Microtechnology and Nanoscience, Microwave Electronics Laboratory, Chalmers Univeristy of Technology, Sweden Niklas Rorsman: Microtechnology and Nanoscience, Microwave Electronics Laboratory, Chalmers Univeristy of Technology, Sweden Herbert Zirath: Microtechnology and Nanoscience, Microwave Electronics Laboratory, Chalmers Univeristy of Technology, Sweden
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Year:
2003
Conference:
GigaHertz 2003. Proceedings from the Seventh Symposium
Issue:
008
Article no.:
034
No. of pages:
4
Publication type:
Poster
Published:
2003-11-06
Series:
Linköping Electronic Conference Proceedings
ISSN (print):
1650-3686
ISSN (online):
1650-3740
Publisher:
Linköping University Electronic Press; Linköpings universitet


Using our in-house 0.3 ¬Ķm mushroom gate process; AlGaN/GaN high electron mobility transistors (HEMTs) with total gate periphery up to 0.6 mm were fabricated and characterized. The transistors were processed on an AlGaN/GaN heterostructure grown by MBE on sapphire. Output current densities up to 1 A/mm and extrinsic DC-transconductances (gm) of 240 mS/mm were measured. Extrinsic cut-off frequencies (ft) of 35 GHz; maximum frequencies of oscillation (fmax) of 75 GHz; were calculated from S-parameters measurements. On wafer Load-Pull measurements were performed without any active cooling on HEMTs of different sizes. Continuous wave (CW) output power densities up to 3.2 W/mm at 6 dB compression and 1.9 W/mm at 3 dB compression at 6 GHz were achieved.

GigaHertz 2003. Proceedings from the Seventh Symposium

Author:
Vincent Desmaris, Joakim Eriksson, Niklas Rorsman, Herbert Zirath
Title:
Fabrication and characterization of submicron AlGaN/GaN HEMTs
References:

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GigaHertz 2003. Proceedings from the Seventh Symposium

Author:
Vincent Desmaris, Joakim Eriksson, Niklas Rorsman, Herbert Zirath
Title:
Fabrication and characterization of submicron AlGaN/GaN HEMTs
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